Help on Technology Data Input
Sample 5-metal epi technology cross-section and the associated technology data form.


Note: The oxide layer under the poly is neglected in the technology data.

Technology data
8 metal levels max.
Layer Name Layer
Number
Layer Prop.
(RSH/e)
Thickness
(microns)
Metal 8
ILD 8
Metal 7
ILD 7
Metal 6
ILD 6
Metal 5
ILD 5
Metal 4
ILD 4
Metal 3
ILD 3
Metal 2
ILD 2
Metal 1
ILD 1
Poly 0
Epi 0
Sub 0