Sample 5-metal epi technology cross-section and the associated technology data form.


Note: The oxide layer under the poly is neglected in the technology data.

Technology data 8 metal levels max. Layer Name Layer Number Layer Prop. (RSH/e) Thickness (microns) Metal 8 ILD 8 Metal 7 ILD 7 Metal 6 ILD 6 Metal 5 ILD 5 Metal 4 ILD 4 Metal 3 ILD 3 Metal 2 ILD 2 Metal 1 ILD 1 Poly 0 Epi 0 Sub 0